Classification of microsensors:
According to whether there is energy supply, it can be divided into active microsensors (for example: piezoelectric ) And passive microsensors (for example: fluorescence)
According to the different objects that microsensors can measure, they can be divided into the following nine categories:
Mechanical micro-sensors: micro-sensors used to measure force, deformation, displacement and speed.
Electrical micro-sensors: micro-sensors used to measure current, potential, resistance and capacitance.
Magnetic micro-sensor: a micro-sensor used to measure magnetic field size, magnetic field polarity, magnetic flux and permeability.
Thermal micro-sensor: a micro-sensor used to measure temperature, specific heat capacity, thermal conductivity and heat capacity.
Acoustic micro-sensor: Micro-sensor used for measuring amplitude, phase, polarization and sound spectrum.
Optical micro-sensor: micro-sensor used for measuring spectrum, wave speed, amplitude and phase.
Radiation micro-sensor: micro-sensor for X-ray, ultraviolet, microwave and radio wave measurement.
Chemical micro-sensor: Micro-sensor used to measure composition, concentration, humidity and pH value.
Biological microsensors: microsensors for hormone, antigen, sugar and biomass measurement.